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Wet Processing Knowledge Hub

Expert knowledge on wet benches, wet bench systems, and wet chemical process equipment.

What is a Wet Bench?

A wet bench is an industrial process system used for wet chemical processes such as cleaning, wafer cleaning, wet chemical etching, and surface treatment. It enables precise, reproducible, and controlled processing of materials under defined conditions such as chemical concentration, temperature, and process time.

PaceTec specializes in the development of wet benches, wet bench systems, and wet chemical process equipment for applications in semiconductor manufacturing, medical technology, microelectronics, and glass processing. The focus is on process-reliable, cleanroom-compatible, and automated solutions for high-end industrial applications.

On the following pages, you will find comprehensive technical information on wet bench fundamentals, wafer cleaning, RCA processes (SC1/SC2), megasonic and ultrasonic cleaning, HF dip, wet chemical etching (e.g., HF and KOH), as well as applications in medical technology and glass processing.

Wet Bench Fundamentals

Understand the design, functionality, and applications of modern wet bench systems – from chemical supply to automated process control.

wet chemical cleaning processes

Efficient removal of particles, organic residues, and contaminants using processes such as RCA cleaning, Piranha cleaning, ultrasonic cleaning, and megasonic cleaning.

Wet Chemical Etching Processes and Wet Bench Systems for Industrial Applications

Precision material processing through controlled wet etching processes using HF, KOH, acids, and specialized chemicals for industrial and high-tech applications

solvent-based wet processes

Solvent-based cleaning processes for the removal of oils, greases, coatings, and process residues – including safe ATEX-compliant wet bench solutions.

semiconductor wet chemical processes

Wafer cleaning, etching, rinsing, and drying for the highest cleanliness requirements in modern semiconductor manufacturing.

wet processes in medical technology

Reinigung, Ätzen und Oberflächenbearbeitung für Implantate, Stents und medizinische Präzisionskomponenten mit reproduzierbaren Prozessen.

rinse processes in wet bench systems

Reinstwasser-Spülverfahren für Halbleiter, Medizintechnik und industrielle Präzisionsprozesse

drying processes in wet bench system

Advanced drying technologies for residue-free wafer drying after wet chemical processes.