Semiconductor and Electronics
Wet-Chemical Processes in the Semiconductor and Electronics Industry
Wet-chemical processes are essential for numerous applications in semiconductor and electronics manufacturing. You define the level of automation – we offer manual, semi-automated, and fully automated wet benches.
Typical applications of wet benches include:
- Microelectronics: Cleaning and structuring of silicon wafers for IC (integrated circuit) and transistor manufacturing.
- Photonics: Processing of gallium arsenide (GaAs) and indium phosphide (InP) wafers for optoelectronic components such as LEDs or lasers.
- Sensor technology: Manufacturing of MEMS, sensors, and actuators through etching and coating processes.
- Power electronics: Processing of silicon carbide (SiC) and gallium nitride (GaN) wafers for high-performance components.
- Biotechnology: Surface modification for lab-on-a-chip systems and medical sensors.
Typical process steps for wafer manufacturing that can be performed on our wet-chemical systems include:
- Cleaning processes such as SC1/SC2/RCA/HF dip
- Ultrasonic cleaning
- Megasonic cleaning
- Etching (Au etching; nitrite etching; oxide etching; TMAH etching; KOH etching; NaOH etching; Al etching)
- Development
- Electroless plating
- Stripping
- Lift-off
- Drying
Our Customer Success Stories in Semiconductors and Electronics
Our systems are used wherever precision and reliability are essential. Here, you’ll find selected customer projects from the semiconductor and electronics industries.
Challenging Applications in High-Tech Industries
Our machines can be designed as either single-wafer systems or batch systems, each tailored to specific process requirements.
SECS-GEM integration and the use of FM4910-compliant materials are standard features. We process wafers up to a size of 300 mm (12″) while maintaining the highest industry standards. Our ATEX-compliant wet bench is specifically designed to eliminate potential ignition sources by utilizing robust materials, specialized ventilation systems, and precise safety mechanisms to ensure the safe handling of flammable solvents such as isopropanol (IPA) and acetone.
Our state-of-the-art, custom wet benches are specifically tailored to meet the demands of these complex applications, offering maximum process reliability, efficiency, and precision.
Customized Solutions for Challenging Applications in High-Tech Industries
Together, we develop the ideal solution for your wet-chemical applications. We are happy to provide expert consultation.
