Semiconductor & electronics
Wet chemical processes are omnipresent in the semiconductor and electronics industry and are indispensable. With the PACE-Tec machines, we map these processes in wet chemistry for wafers/glass substrates.
Possible applications of wafers & substrates:
- Surface cleaning
- Etching
- Drying with IPA / hot air / HF ozone
- Development of wafers
- Stripping
- Lift Off
- Parts cleaning
Requirements in the industry
- SECS Gem connection
- FM4910 compatible material required
- Different wafer sizes
- Different wafer thicknesses
- Adaptation to the existing certified process
- Evaluation of new processes
- Production in the clean room with the individual requirements
Benefits for the industry
- Different wafer sizes/thicknesses possible
- No recertification necessary
- Individual adaptation to the previous production process at customer site
Application examples pictures semiconductor & electronics
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