Wet chemical processes are omnipresent in the semiconductor and electronics industry and are indispensable. PACE-Tec offers equipment for wet chemical for wafer/ glass substrates.
Possible applications of wafers & substrates:
Surface cleaning
Etching
Drying with IPA / hot air / HF ozone
Development of wafers
Stripping
Lift Off
Parts cleaning
Requirements in the industry
SECS Gem connection
FM4910 compatible material required
Different wafer sizes
Different wafer thicknesses
Adaptation to the existing certified process
Evaluation of new processes
Production in the clean room with the individual requirements
Benefits for the industry
Different wafer sizes/thicknesses possible
No recertification necessary
Individual adaptation to the previous production process at customer site