What is a Wet Bench?
A Wet Bench is a technical process system designed for the controlled execution of wet chemical processes.
Wet Bench systems are used to treat components, wafers, glass substrates, and other technical materials with liquids in order to clean surfaces, selectively remove materials, or modify surface properties.
Wet Bench systems are used whenever the highest requirements for:
- cleanliness
- process control
- repeatability
- surface quality
must be achieved.
Which processes are performed in a Wet Bench?
A Wet Bench can integrate and perform various process steps.
Typical applications include:
Cleaning
Removal of:
- particles
- organic residues
- metal contamination
Example:
Wafer cleaning in semiconductor manufacturing.
Wet Chemical Etching
During etching processes, materials are selectively removed through controlled chemical reactions.
Examples:
- removal of oxide layers
- surface structuring
- material removal from glass or silicon
Rinsing and Drying
After chemical processes, residues must be completely removed.
This includes:
- ultrapure water rinsing
- drying processes
- controlled transfer to subsequent process steps
Why are Wet Benches important?
Modern products require increasingly precise and controlled surface properties.
In industries such as:
- semiconductor manufacturing
- microelectronics
- medical technology
- glass processing
even the smallest contamination particles or process deviations can significantly affect product quality.
Wet Bench systems enable:
- stable process conditions
- repeatable results
- controlled chemical treatment
- safe processing of sensitive materials
Typical Applications of Wet Benches
Semiconductor Industry
In semiconductor manufacturing, Wet Benches are used for:
- wafer cleaning
- RCA cleaning
- Piranha cleaning
- SC1 / SC2 cleaning
- HF dip processes
- ultrasonic cleaning
- megasonic cleaning
- etching processes
- lift-off processes
- developer processes
Medical Technology
Applications:
- cleaning of medical components
- titanium surface treatment
- etching and cleaning of dental implants
- etching, cleaning, and electropolishing of stents
Glass and Advanced Materials
Applications:
- glass etching
- microstructuring
- sensors and sensor technology
How is a Wet Bench constructed?
An industrial Wet Bench consists of several integrated components.
Process Tanks
The process tank is the central area of the system.
This is where:
- chemical treatment
- cleaning
- etching
takes place.
Chemical Supply System
The chemical supply system provides process media in a controlled manner.
Important functions include:
- chemical dosing
- concentration control
- temperature control
- process media management
Rinsing System
Rinsing processes remove chemical residues and prepare components for subsequent process steps.
Exhaust System and Safety
Since many process chemicals can be aggressive, Wet Bench systems are equipped with:
- exhaust technology
- safety systems
- process monitoring
- chemical-resistant materials
Which types of Wet Benches exist?
Manual Wet Bench
With manual Wet Bench systems, the operator performs the individual process steps.
Typical applications:
- research
- development
- small-batch production
Advantages:
- high flexibility
- quick adaptation to changing requirements
- simple operation
Automated Wet Bench
Automated Wet Bench systems independently execute defined process sequences.
Features:
- automated handling
- defined process sequences
- process monitoring
- higher process repeatability
Typical applications:
- industrial volume production
- semiconductor manufacturing
PaceTec Expertise
PaceTec develops customized Wet Bench systems for demanding industrial applications.
The design process considers:
- specific process requirements
- used chemicals and process media
- material properties
- required automation level
- safety requirements
A successful wet processing system is created through the combination of:
Process + Chemistry + Material + System Engineering